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                                       Details for article 9 of 16 found articles
 
 
  Exploration of baking temperature effects on 28nm BEOL reliability
 
 
Title: Exploration of baking temperature effects on 28nm BEOL reliability
Author: Zhao, XiangFu
Chien, Wei Ting Kary
Appeared in: Microelectronics reliability
Paging: Volume 72 (2017) nr. C pages 4 p.
Year: 2017
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 9 of 16 found articles
 
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