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Morphological and electrical comparison of Ti and Ta based ohmic contacts for AlGaN/GaN-on-SiC HFETs |
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Title: |
Morphological and electrical comparison of Ti and Ta based ohmic contacts for AlGaN/GaN-on-SiC HFETs |
Author: |
Pooth, A. Bergsten, J. Rorsman, N. Hirshy, H. Perks, R. Tasker, P. Martin, T. Webster, R.F. Cherns, D. Uren, M.J. Kuball, M. |
Appeared in: |
Microelectronics reliability |
Paging: |
Volume 68 (2017) nr. C pages 3 p. |
Year: |
2017 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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