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                                       Details for article 118 of 136 found articles
 
 
  Reliability evaluation of tungsten donut-via as an element of the highly robust metallization
 
 
Title: Reliability evaluation of tungsten donut-via as an element of the highly robust metallization
Author: Hein, Verena
Erstling, Marco
Sethu, Raj Sekar
Weide-Zaage, Kirsten
Bai, Tianlin
Appeared in: Microelectronics reliability
Paging: Volume 64 (2016) nr. C pages 7 p.
Year: 2016
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 118 of 136 found articles
 
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