Band diagram for low-k/Cu interconnects: The starting point for understanding back-end-of-line (BEOL) electrical reliability
Titel:
Band diagram for low-k/Cu interconnects: The starting point for understanding back-end-of-line (BEOL) electrical reliability
Auteur:
Mutch, Michael J. Pomorski, Thomas Bittel, Brad C. Cochrane, Corey J. Lenahan, Patrick M. Liu, Xin Nemanich, Robert J. Brockman, Justin French, Marc Kuhn, Markus French, Benjamin King, Sean W.