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As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability |
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Title: |
As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability |
Author: |
Tang, B.J. Croes, K. Barbarin, Y. Wang, Y.Q. Degraeve, R. Li, Y. Toledano-Luque, M. Kauerauf, T. Bömmels, J. Tőkei, Zs. De Wolf, I. |
Appeared in: |
Microelectronics reliability |
Paging: |
Volume 54 (2014) nr. 9-10 pages 5 p. |
Year: |
2014 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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