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                                       Details for article 12 of 20 found articles
 
 
  Measuring time-dependent deformations in metallic MEMS
 
 
Title: Measuring time-dependent deformations in metallic MEMS
Author: Bergers, L.I.J.C.
Hoefnagels, J.P.M.
Delhey, N.K.R.
Geers, M.G.D.
Appeared in: Microelectronics reliability
Paging: Volume 51 (2011) nr. 6 pages 6 p.
Year: 2011
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 12 of 20 found articles
 
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