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                                       Details for article 17 of 59 found articles
 
 
  Erratum to “On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies” [MR 51/9–11 (2011) 1810–1818]
 
 
Title: Erratum to “On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies” [MR 51/9–11 (2011) 1810–1818]
Author: Zaghloul, Usama
Papaioannou, George
Bhushan, Bharat
Coccetti, Fabio
Pons, Patrick
Plana, Robert
Appeared in: Microelectronics reliability
Paging: Volume 51 (2011) nr. 12 pages 1 p.
Year: 2011
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 17 of 59 found articles
 
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