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Details for article 1 of 140 found articles
| Title: |
Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS |
| Author: |
Sasaki, Yuji Ciappa, Mauro Masunaga, Takayuki Fichtner, Wolfgang |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 50 (2010) nr. 9-11 pages 5 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 140 found articles
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