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                                       Details for article 3 of 16 found articles
 
 
  A new on-chip test structure for real time fatigue analysis in polysilicon MEMS
 
 
Title: A new on-chip test structure for real time fatigue analysis in polysilicon MEMS
Author: Langfelder, G.
Longoni, A.
Zaraga, F.
Corigliano, A.
Ghisi, A.
Merassi, A.
Appeared in: Microelectronics reliability
Paging: Volume 49 (2009) nr. 2 pages 7 p.
Year: 2009
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 3 of 16 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands