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                                       Details for article 17 of 97 found articles
 
 
  Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node
 
 
Title: Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node
Author: Schlangen, R.
Sadewater, P.
Kerst, U.
Boit, C.
Appeared in: Microelectronics reliability
Paging: Volume 46 (2006) nr. 9-11 pages 6 p.
Year: 2006
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 17 of 97 found articles
 
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