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Journal description
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Details for article 10 of 20 found articles
| Title: |
Interfacial properties and reliability of SiO2 grown on 6H-SiC in dry O2 plus trichloroethylene |
| Author: |
Lai, P.T. Xu, J.P. Wu, H.P. Chan, C.L. |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 44 (2004) nr. 4 pages 4 p. |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 20 found articles
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