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Journal description
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Details for article 12 of 26 found articles
| Title: |
Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors |
| Author: |
Paskaleva, Albena Lemberger, Martin Zürcher, Stefan Bauer, Anton J. Frey, Lothar Ryssel, Heiner |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 43 (2003) nr. 8 pages 5 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 26 found articles
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