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                                       Details for article 20 of 110 found articles
 
 
  Characterization of Trench MOS Gate Structures Utilizing Photon Emission Microscopy
 
 
Title: Characterization of Trench MOS Gate Structures Utilizing Photon Emission Microscopy
Author: Usui, Masanori
Sugiyama, Takahide
Ishiko, Masayasu
Morimoto, Jun
Saitoh, Hirokazu
Ajioka, Masaki
Appeared in: Microelectronics reliability
Paging: Volume 42 (2002) nr. 9-11 pages 6 p.
Year: 2002
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 20 of 110 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands