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Journal description
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Details for article 4 of 15 found articles
| Title: |
Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance |
| Author: |
Ito, Shinya Namba, Hiroaki Hirata, Tsuyoshi Ando, Koichi Koyama, Shin Ikezawa, Nobuyuki Suzuki, Tatsuya Saitoh, Takehiro Horiuchi, Tadahiko |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 42 (2002) nr. 2 pages 9 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 15 found articles
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