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Journal description
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Details for article 6 of 16 found articles
| Title: |
Effects of the sputtering deposition process of metal gate electrode on the gate dielectric characteristics |
| Author: |
Yamada, Takayuki Moriwaki, Masaru Harada, Yoshinao Fujii, Shinji Eriguchi, Koji |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 41 (2001) nr. 5 pages 8 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 16 found articles
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