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                                       Details for article 14 of 83 found articles
 
 
  Characterization of film defects in silicon epitaxial wafers
 
 
Title: Characterization of film defects in silicon epitaxial wafers
Author:
Appeared in: Microelectronics reliability
Paging: Volume 4 (1965) nr. 2 pages 1 p.
Year: 1965
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 14 of 83 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands