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  Accelerated dielectric breakdown and wear out standard testing methods and structures for reliability evaluation of thin oxides
 
 
Title: Accelerated dielectric breakdown and wear out standard testing methods and structures for reliability evaluation of thin oxides
Author: Ghibaudo, G
Pananakakis, G
Kies, R
Vincent, E
Papadas, C
Appeared in: Microelectronics reliability
Paging: Volume 39 (1999) nr. 5 pages 17 p.
Year: 1999
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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