The kinetics of the early stages of electromigration and concurrent temperature induced processes in thin film metallisations studied by means of an in-situ high resolution resistometric technique
Titel:
The kinetics of the early stages of electromigration and concurrent temperature induced processes in thin film metallisations studied by means of an in-situ high resolution resistometric technique
Auteur:
Van Olmen, J. Manca, J.V. De Ceuninck, W. De Schepper, L. D’Haeger, V. Witvrouw, A. Maex, K. Vandevelde, B. Beyne, E. Tielemans, L.