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Journal description
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Details for article 7 of 21 found articles
| Title: |
Avoidance of stiction in the release of highly boron doped micro-actuators fabricated using BESOI substrates |
| Author: |
Rosa, M.A Dimitrijev, S Harrison, H.B |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 39 (1999) nr. 1 pages 4 p. |
| Year: |
1999 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 21 found articles
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