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                                       Details for article 13 of 19 found articles
 
 
  Plasma doping for ultra-shallow junctions
 
 
Title: Plasma doping for ultra-shallow junctions
Author: Chan, Chung
Qin, Shu
Appeared in: Microelectronics reliability
Paging: Volume 38 (1998) nr. 9 pages 4 p.
Year: 1998
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 13 of 19 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands