|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 8 of 21 found articles
| Title: |
Experimental verification of three-dimensional simulations of LTO layer deposition on structures prepared by anisotropic wet etching of silicon |
| Author: |
Bär, E Lorenz, J Ryssel, H |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 38 (1998) nr. 2 pages 5 p. |
| Year: |
1998 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 21 found articles
| << previous | next >> |