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                                       Details for article 170 of 170 found articles
 
 
  Zero-defect sputter deposition metallization method for high volume manufacturing of grafted multilayer thin film modules
 
 
Title: Zero-defect sputter deposition metallization method for high volume manufacturing of grafted multilayer thin film modules
Author:
Appeared in: Microelectronics reliability
Paging: Volume 34 (1994) nr. 12 pages 1 p.
Year: 1994
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 170 of 170 found articles
 
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