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                                       Details for article 22 of 22 found articles
 
 
  The filling of via-holes by a sputtered AlSi alloy and the development of a two-level metallisation structure
 
 
Title: The filling of via-holes by a sputtered AlSi alloy and the development of a two-level metallisation structure
Author: Nahar, R.K.
Devashrayee, N.M.
Wadhawan, O.P.
Vyas, P.D.
Appeared in: Microelectronics reliability
Paging: Volume 33 (1993) nr. 2 pages 5 p.
Year: 1993
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 22 of 22 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands