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Journal description
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Details for article 99 of 184 found articles
| Title: |
4960489 Method for self-aligned manufacture of contacts between interconnects contained in wiring levels arranged above one another in an integrated circuit |
| Author: |
Roeska, Guenther Winnerl, Josef Neppl, Franz |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 31 (1991) nr. 5 pages 1 p. |
| Year: |
1991 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 99 of 184 found articles
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