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Journal description
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Details for article 131 of 153 found articles
| Title: |
Spectroscopic studies of fluorescent emission in plasma etching of Si and SiO2 and the mechanism of gas-surface interactions |
| Author: | |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 24 (1984) nr. 6 pages 2 p. |
| Year: |
1984 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 131 of 153 found articles
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