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Journal description
All volumes of the corresponding journal
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Details for article 62 of 177 found articles
| Title: |
Etching SiO2 in a reactive ion beam |
| Author: | |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 22 (1982) nr. 4 pages 1 p. |
| Year: |
1982 |
| Contents: | |
| Publisher: |
Pergamon Press Ltd. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 62 of 177 found articles
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