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                                       Details for article 7 of 7 found articles
 
 
  Synergistic enhancement of adhesion and electromigration reliability of cobalt via super-diluted (0.06 at.%) tungsten alloying as next-generation interconnect materials
 
 
Title: Synergistic enhancement of adhesion and electromigration reliability of cobalt via super-diluted (0.06 at.%) tungsten alloying as next-generation interconnect materials
Author: Fang, Jau-Shiung
Su, Ting-Hsun
Cheng, Yi-Lung
Chen, Giin-Shan
Appeared in: Microelectronics reliability
Paging: Volume 158 () nr. C pages p.
Year: 2024
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 7 found articles
 
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