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Journal description
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Details for article 79 of 175 found articles
| Title: |
Field emission induced-damage in the actuation paths of MEMS capacitive structures |
| Author: |
Theocharis, J. Koutsoureli, M. Gardelis, S. Konstantinidis, G. Papaioannou, G. |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 114 () nr. C pages p. |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 79 of 175 found articles
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