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                                       Details for article 654 of 3017 found articles
 
 
  Crack identification and evaluation in BEoL stacks of two different samples utilizing acoustic emission testing and nano X-ray computed tomography
 
 
Title: Crack identification and evaluation in BEoL stacks of two different samples utilizing acoustic emission testing and nano X-ray computed tomography
Author: Silomon, Jendrik
Gluch, Jürgen
Clausner, André
Paul, Jens
Zschech, Ehrenfried
Appeared in: Microelectronics reliability
Paging: Volume 121 () nr. C pages p.
Year: 2021
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 654 of 3017 found articles
 
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