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Journal description
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Details for article 942 of 1093 found articles
| Title: |
Simulation of time depending void formation in copper, aluminum and tungsten plugged via structures |
| Author: |
Dalleau, David Weide-Zaage, Kirsten Danto, Yves |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 43 (2003) nr. 9-11 pages 6 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 942 of 1093 found articles
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