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Laser THz emission microscope as a novel tool for LSI failure analysis |
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Title: |
Laser THz emission microscope as a novel tool for LSI failure analysis |
Author: |
Yamashita, Masatsugu Otani, Chiko Kim, Sunmi Murakami, Hironaru Tonouchi, Masayoshi Matsumoto, Toru Midoh, Yoshihiro Miura, Katsuyoshi Nakamae, Koji Nikawa, Kiyoshi |
Appeared in: |
Microelectronics reliability |
Paging: |
Volume 49 (2009) nr. 9-11 pages 11 p. |
Year: |
2009 |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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