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Journal description
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Details for article 172 of 551 found articles
| Title: |
Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials – An adaptive calibration algorithm |
| Author: |
Scholz, P. Herfurth, N. Sadowski, M. Lundquist, T. Kerst, U. Boit, C. |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 54 (2014) nr. 9-10 pages 4 p. |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 172 of 551 found articles
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