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Journal description
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Details for article 404 of 572 found articles
| Title: |
Optimization of SiN X :H films deposited by PECVD for reliability of electronic, microsystems and optical applications |
| Author: |
Herth, E. Legrand, B. Buchaillot, L. Rolland, N. Lasri, T. |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 50 (2010) nr. 8 pages 4 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 404 of 572 found articles
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