|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 385 of 3051 found articles
| Title: |
A simple method for sub-100nm pattern generation with I-line double-patterning technique |
| Author: |
Tsai, Tzu-I Lin, Horng-Chih Jian, Min-Feng Huang, Tiao-Yuan Chao, Tien-Sheng |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 50 (2010) nr. 5 pages 5 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 385 of 3051 found articles
| << previous | next >> |