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                                       Details for article 138 of 190 found articles
 
 
  Plasma damage in thin gate MOS dielectrics and its effect on device characteristics and reliability
 
 
Title: Plasma damage in thin gate MOS dielectrics and its effect on device characteristics and reliability
Author: Brożek, Tomasz
Huber, John
Walls, James
Appeared in: Microelectronics reliability
Paging: Volume 40 (2000) nr. 4-5 pages 7 p.
Year: 2000
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 138 of 190 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands