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Journal description
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Details for article 35 of 123 found articles
| Title: |
Diffusion barrier performance of Zr–N/Zr bilayered film in Cu/Si contact system |
| Author: |
Wang, Ying Cao, Fei Ding, Ming-hui Liu, Yun-tao |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 48 (2008) nr. 11-12 pages 4 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 35 of 123 found articles
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