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Journal description
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Details for article 112 of 145 found articles
| Title: |
Reliability and yield in fabrication of microcantilever structures using bulk silicon micromachining |
| Author: |
Rawicz, A. Parameswaran, M. Chen, J.M. |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 36 (1996) nr. 10 pages 6 p. |
| Year: |
1996 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 112 of 145 found articles
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