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Optimized design of Si-cap layer in strained-SiGe channel p-MOSFETs based on computational and experimental approaches |
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Title: |
Optimized design of Si-cap layer in strained-SiGe channel p-MOSFETs based on computational and experimental approaches |
Author: |
Sato-Iwanaga, Junko Inoue, Akira Sorada, Haruyuki Takagi, Takeshi Rothschild, Aude Loo, Roger Biesemans, Serge Ito, Choshu Liu, Yang Dutton, Robert W. Tsuchiya, Hideaki |
Appeared in: |
Solid-state electronics |
Paging: |
Volume 91 (2014) nr. C pages 8 p. |
Year: |
2014 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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