Study of substrate orientations impact on Ultra Thin Buried Oxide (UTBOX) FDSOI High-K Metal gate technology performances
Titel:
Study of substrate orientations impact on Ultra Thin Buried Oxide (UTBOX) FDSOI High-K Metal gate technology performances
Auteur:
Ben Akkez, Imed Fenouillet-Beranger, Claire Cros, Antoine Perreau, Pierre Haendler, Sébatien Weber, Olivier Andrieu, François Pellissier-Tanon, D. Abbate, F. Richard, C. Beneyton, R. Gouraud, P. Margain, A. Borowiak, C. Gourvest, E. Bourdelle, K.K. Nguyen, B.Y. Poiroux, T. Skotnicki, Thomas Faynot, Olivier Balestra, Francis Ghibaudo, Gérard Boeuf, Fréderic