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  Aluminum-induced iso-epitaxy of silicon for low-temperature fabrication of centimeter-large p+n junctions
 
 
Title: Aluminum-induced iso-epitaxy of silicon for low-temperature fabrication of centimeter-large p+n junctions
Author: Sakic, Agata
Qi, Lin
Scholtes, Tom L.M.
van der Cingel, Johan
Nanver, Lis K.
Appeared in: Solid-state electronics
Paging: Volume 84 (2013) nr. C pages 9 p.
Year: 2013
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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