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Electrical characteristics of SiGe pMOSFET devices with tantalum or titanium oxide higher-k dielectric stack |
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Title: |
Electrical characteristics of SiGe pMOSFET devices with tantalum or titanium oxide higher-k dielectric stack |
Author: |
Li, Chen-Chien Chang-Liao, Kuei-Shu Fu, Chung-Hao Tzeng, Te-Hsuen Lu, Chun-Chang Hong, Hao-Zhi Chen, Ting-Ching Wang, Tien-Ko Tsai, Wen-Fa Ai, Chi-Fong |
Appeared in: |
Solid-state electronics |
Paging: |
Volume 78 (2012) nr. C pages 5 p. |
Year: |
2012 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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