105nm Gate length pMOSFETs with high-K and metal gate fabricated in a Si process line on 200mm GeOI wafers
Title:
105nm Gate length pMOSFETs with high-K and metal gate fabricated in a Si process line on 200mm GeOI wafers
Author:
Le Royer, C. Clavelier, L. Tabone, C. Romanjek, K. Deguet, C. Sanchez, L. Hartmann, J.-M. Roure, M.-C. Grampeix, H. Soliveres, S. Le Carval, G. Truche, R. Pouydebasque, A. Vinet, M. Deleonibus, S.