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Journal description
All volumes of the corresponding journal
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Details for article 2 of 28 found articles
| Title: |
All hot wire CVD TFTs with high deposition rate silicon nitride (3nm/s) |
| Author: |
Schropp, R.E.I. Nishizaki, S. Houweling, Z.S. Verlaan, V. van der Werf, C.H.M. Matsumura, H. |
| Appeared in: |
Solid-state electronics |
| Paging: | Volume 52 (2008) nr. 3 pages 5 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 28 found articles
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