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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 27 of 30 found articles
| Title: |
Rapid post-metallization annealing effects on high-k Y2O3/Si capacitor |
| Author: |
Lay, T.S. Liao, Y.Y. Liu, W.D. Lai, Y.H. Hung, W.H. Kwo, J. Hong, M. Mannaerts, J.P. |
| Appeared in: |
Solid-state electronics |
| Paging: | Volume 47 (2003) nr. 6 pages 5 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 27 of 30 found articles
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