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                                       Details for article 15 of 19 found articles
 
 
  Rapid thermal oxidation of radio frequency sputtered polycrystalline Si1−x Ge x thin films
 
 
Title: Rapid thermal oxidation of radio frequency sputtered polycrystalline Si1−x Ge x thin films
Author: Natarajan, A.
Bera, L.K.
Choi, W.K.
Osipowicz, T.
Seng, H.L.
Appeared in: Solid-state electronics
Paging: Volume 45 (2001) nr. 11 pages 5 p.
Year: 2001
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 15 of 19 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands