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  Measurement and simulation of boron diffusion in strained Si1−x Ge x epitaxial layers with a linearly graded germanium profile
 
 
Title: Measurement and simulation of boron diffusion in strained Si1−x Ge x epitaxial layers with a linearly graded germanium profile
Author: Rajendran, K.
Schoenmaker, W.
Appeared in: Solid-state electronics
Paging: Volume 45 (2001) nr. 11 pages 6 p.
Year: 2001
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 10 of 19 found articles
 
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