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                                       Details for article 17 of 29 found articles
 
 
  Oxidation of rf plasma: hydrogenated crystalline Si
 
 
Title: Oxidation of rf plasma: hydrogenated crystalline Si
Author: Alexandrova, S
Szekeres, A
Dimova-Malinovska, D
Appeared in: Solid-state electronics
Paging: Volume 43 (1999) nr. 6 pages 4 p.
Year: 1999
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 17 of 29 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands