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Journal description
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Details for article 13 of 20 found articles
| Title: |
Low permittivity dielectrics and global planarization for quarter-micron multilevel interconnections |
| Author: |
Homma, Yoshio Furusawa, Takeshi Morishima, Hiroyuki Sato, Hidetada |
| Appeared in: |
Solid-state electronics |
| Paging: | Volume 41 (1997) nr. 7 pages 7 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 20 found articles
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