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Journal description
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Details for article 10 of 24 found articles
| Title: |
Electrical and optical changes in AlGaAs and InGaP during dielectric etching in ECR SF6 plasmas |
| Author: |
Lee, K.N Lee, J.W Abernathy, C.R Pearton, S.J Hobson, W.S Ren, F |
| Appeared in: |
Solid-state electronics |
| Paging: | Volume 41 (1997) nr. 3 pages 4 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 24 found articles
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