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                                       Details for article 13 of 51 found articles
 
 
  Formation and etching of thin nitride layers on GaAs using atomic nitrogen and hydrogen
 
 
Title: Formation and etching of thin nitride layers on GaAs using atomic nitrogen and hydrogen
Author: Makimoto, Toshiki
Kobayashi, Naoki
Appeared in: Solid-state electronics
Paging: Volume 41 (1997) nr. 2 pages 3 p.
Year: 1997
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 13 of 51 found articles
 
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